UHV angle valve is used for ultrahigh vacuum condition or within baking condition. Applicable media is air and non-corrosive gases. The ideal structure with bellows shaft sealing and flange with non-oxygen copper metal sealed, thus canwithstand 450ºCtemperature.
Optional CD-J angle type and CD-S tee type within flange end pre-pump port.
Operation can be manual, pneumatic, electric motorized drive.
Scope Of Application | 105~1.3×10-7Pa |
Valve Leakage Rate | ≤1.3×10-8Pa.L/S. |
Medium Temperature | ≤450ºC |
Installation Status | Any |
Body、Stem、Bonnet | Stainless Steel |
Seal | Non-oxygen Copper、Bellows (Shaft Seal) |